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Step-edge junction fabrication by a Si/YBCO reactive patterning technique

✍ Scribed by C. Camerlingo; H. Huang; B. Ruggiero; M. Russo; E. Sarnelli; G. Testa; L. Correra; S. Guerri; S. Neri; S. Nicoletti; G. Pizzochero; Y. Su

Publisher: Elsevier Science
Year: 1994
Tongue: English
Weight: 362 KB
Volume: 232
Category: Article
ISSN: 0921-4534
DOI: 10.1016/0921-4534(94)90291-7

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✦ Synopsis

An improved procedure for fabricating step-edge Josephson junctions by YBCO on NdGaO3 substrates is described. It is based on a reactive patterning of the superconducting film geometry by using a SiOx inhibit process. SQUID's have been fabricated following this technique. Preliminary measurements on the transport properties in single junctions and on the magnetic response in DC SQUID's are reported. Promising results have been obtained at T=4.2 K.

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