Nanotopography produced by using a vacuum pin chuck and the flattening ability around its periphery

✍ Scribed by A. Une; K. Yoshitomi; M. Mochida

• Book ID: 108207692
• Publisher: Elsevier Science
• Year: 2007
• Tongue: English
• Weight: 260 KB
• Volume: 84
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2007.01.004