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Nanostructured porous silicon as functionalized material for biosensor application

✍ Scribed by Shalini Singh; Shailesh N. Sharma; Govind; S. M. Shivaprasad; Mohan Lal; Mukhtar A. Khan

Book ID
106399927
Publisher
Springer
Year
2008
Tongue
English
Weight
641 KB
Volume
20
Category
Article
ISSN
0957-4530

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## Abstract Nanostructured porous silicon layers are studied for the purpose of their use as electrical insulators between mono‐crystalline silicon substrates and integrated planar radio frequency (rf) devices. The capacitive nature of the layers with a tangent loss lower than 10^–2^ is demonstrate