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Nanostructured GaN: Microstructure and optical properties

✍ Scribed by Benaissa, M.; José-Yacamán, M.; Hernández, J.; Bokhimi, ; Gonsalves, K.; Carlson, G.


Book ID
115471473
Publisher
The American Physical Society
Year
1996
Tongue
English
Weight
452 KB
Volume
54
Category
Article
ISSN
1098-0121

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## Abstract The influence of process parameters and template characteristics on the morphology and optical properties of self‐assembled nanostructures produced by dry etching from GaN/sapphire templates was investigated. It was found that the chemical component in the etching gas–chlorine supports