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Nanostructured CeO2 thin films: A SAXS study of the interface between grains and pores

✍ Scribed by M. Lučić Lavčević; A. Turković; P. Dubček; S. Bernstorff


Book ID
108289559
Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
232 KB
Volume
515
Category
Article
ISSN
0040-6090

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We investigated the evolution of microstructures and the electrical properties of CeO thin films deposited by the reactive 2 DC magnetron sputtering method on the (100) silicon substrate upon annealing in the O gas ambient. The CeO thin films 2 2 deposited at 3008C were polycrystalline. After anneal