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Nanostructural Features and Optical Performance of RF Magnetron Sputtered ZnO Thin Films

✍ Scribed by A.K. Srivastava; Praveen; M. Arora; S.K. Gupta; B.R. Chakraborty; S. Chandra; S. Toyoda; H. Bahadur

Book ID
117695065
Publisher
Allerton Press Inc
Year
2010
Tongue
English
Weight
438 KB
Volume
26
Category
Article
ISSN
1005-0302

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## Abstract ZnO thin films were deposited onto flexible Poly‐Ethylene Terephthalate and Poly‐Ethylene Naphthalate substrates in an ultra‐high vacuum chamber by Pulsed DC Magnetron Sputtering. The process took place at room temperature and in argon atmosphere with fixed pressure, by applying two dif