𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Nanoscale Photoelectron Mapping and Spectroscopy with an Atomic Force Microscope

✍ Scribed by Yu, Ping; Kirschner, Jürgen


Book ID
120704744
Publisher
The American Physical Society
Year
2013
Tongue
English
Weight
623 KB
Volume
111
Category
Article
ISSN
0031-9007

No coin nor oath required. For personal study only.


📜 SIMILAR VOLUMES


SiO2and Si nanoscale patterning with an
✍ B. Klehn; U. Kunze 📂 Article 📅 1998 🏛 Elsevier Science 🌐 English ⚖ 295 KB

The use of an atomic force microscope (AFM) as a nanolithographic tool is demonstrated. A photoresist layer several nanometre thin is indented by the vibrating AFM tip, where software control switches the tapping force from the imaging to the patterning mode. The resist pattern is transferred into a