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Nanoscale etching of resists in view of a mechanistic framework

✍ Scribed by Falco C.M.J.M. van Delft; J. Ben Giesbers; Gert-Jan Nienhuis

Book ID: 104306311
Publisher: Elsevier Science
Year: 1997
Tongue: English
Weight: 312 KB
Volume: 35
Category: Article
ISSN: 0167-9317
DOI: 10.1016/s0167-9317(96)00155-4

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