Understanding Dielectric Breakdown and R
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K.R. Virwani; A.P. Malshe; K.P. Rajurkar
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Article
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2007
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International Academy for Production Engineering
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English
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To address the need to produce sub-50 nm scale features for manufacturing of nano / bio devices and systems, a nanoscale electro-machining (nano-EM) process is being studied. This paper reports unique field induced effects on a tungsten tool. During machining, the tungsten atoms leave the active too