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Nanoscale CMOSFET performance improvement and reliability study for local strain techniques

✍ Scribed by Huang, Hui Ling; Chen, Jem-Kun; Houng, Mau Phon

Book ID: 119373514
Publisher: Elsevier Science
Year: 2013
Tongue: English
Weight: 989 KB
Volume: 79
Category: Article
ISSN: 0038-1101
DOI: 10.1016/j.sse.2012.08.002

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