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Nanoscale Analysis of Multilayer Interfaces of W/Al2O3/Ti/Cu

✍ Scribed by S. Ohta; D. Gotoh; N. Sakaguchi; H. Takahashi

Book ID
110267095
Publisher
Springer
Year
1999
Tongue
English
Weight
438 KB
Volume
7
Category
Article
ISSN
0927-7056

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The Ti/AI203 (1 1 0 2) interface formation has been investigated by X-ray photoelectron spectroscopy and Auger electron spectroscopy (AES). The results showed that when an active metal titanium was evaporated on to a room-temperature AI203 (1 1-0 2) surface in ultrahigh vaccum, a Ti/AI203 interface