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Nanoscale amorphization, bending and recrystallization in silicon nanowires

✍ Scribed by Emanuele F. Pecora; Alessia Irrera; Simona Boninelli; Lucia Romano; Corrado Spinella; Francesco Priolo

Book ID
106022344
Publisher
Springer
Year
2010
Tongue
English
Weight
710 KB
Volume
102
Category
Article
ISSN
1432-0630

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Interaction of megaelectronvolt ion beam
Interaction of megaelectronvolt ion beams with silicon: Amorphization, recrystallization and diffusion
✍ J.M. Poate πŸ“‚ Article πŸ“… 1989 πŸ› Elsevier Science 🌐 English βš– 576 KB

## Three areas will be reviewed where the use of megaelectronvolt ion beams has contributed to the understanding of the properties of amorphous silicon: (1) thermodynamic and relaxation effects; (2) thermal and radiation-enhanced diffusion; (3) interracial segregation. trating on the segregation a