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Nanoreplication in polymers using hot embossing and injection molding

✍ Scribed by H. Schift; C. David; M. Gabriel; J. Gobrecht; L.J. Heyderman; W. Kaiser; S. Köppel; L. Scandella

Publisher
Elsevier Science
Year
2000
Tongue
English
Weight
702 KB
Volume
53
Category
Article
ISSN
0167-9317

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✦ Synopsis

l[Tth polymer molding techniques, it is possible to fabricate nanostructures with a replication fideli~' o~ 25 nanometers. Both hot embossing and injection molding can be used, and cycle times of down to 4 sec can be achieved m a CD injection molding process. The resolution is far below the structure size fi)und today in compact disc memory media. The master structures are produced by electron beam lithography and subsequent dry etching.

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## Abstract The prediction of the crystallinity and microstructure that develop in injection molding is very important for satisfying the required specifications of molded products. A novel approach to the numerical simulation of the skin‐layer thickness and crystallinity in moldings of semicrystal