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Nanometrology and features of metrological assurance of measurements of the roughness and relief parameters of nanostructured surfaces

โœ Scribed by V. G. Lysenko; V. V. Soloviov; P. N. Luskinovich; S. Yu. Zolotarevskii; K. L. Gubskii


Book ID
106466018
Publisher
Springer US
Year
2011
Tongue
English
Weight
151 KB
Volume
53
Category
Article
ISSN
0543-1972

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