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Nanometre structures in semiconductors formed by low energy ion implantation : J. M. Shannon and J. B. Clegg. Vacuum34 (1–2), 193 (1984)

Publisher: Elsevier Science
Year: 1984
Tongue: English
Weight: 136 KB
Volume: 24
Category: Article
ISSN: 0026-2714
DOI: 10.1016/0026-2714(84)90182-3

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📂 Article 📅 1984 🏛 Elsevier Science 🌐 English ⚖ 136 KB