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Nanometer-sized etching of magnetic tunnel junction stack for magnetic random access memory

✍ Scribed by Ik Hyun Park; Su Ryun Min; Wang Hyun Park; Kyung Ho Shin; Chee Won Chung

Book ID: 108184300
Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 204 KB
Volume: 304
Category: Article
ISSN: 0304-8853
DOI: 10.1016/j.jmmm.2006.01.130

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