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Nanometer-scale Si selective growth on Ga-adsorbed voids in ultrathin SiO2 films

✍ Scribed by Yoshiki Nitta; Motoshi Shibata; Ken Fujita; Masakazu Ichikawa

Book ID: 117219685
Publisher: Elsevier Science
Year: 1999
Tongue: English
Weight: 498 KB
Volume: 431
Category: Article
ISSN: 0039-6028
DOI: 10.1016/s0039-6028(99)00511-7

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