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Nanomechanical properties of AlN(1 0 3) thin films by nanoindentation

✍ Scribed by Sheng-Rui Jian; Guo-Ju Chen; Jason S.-C. Jang; Yi-Shao Lai

Book ID
116606022
Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
381 KB
Volume
494
Category
Article
ISSN
0925-8388

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