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Nanomechanical cantilever active probes for ultrasmall mass detection

✍ Scribed by Salehi-Khojin, Amin; Bashash, Saeid; Jalili, Nader; Müller, Maren; Berger, Rüdiger


Book ID
121508481
Publisher
American Institute of Physics
Year
2009
Tongue
English
Weight
830 KB
Volume
105
Category
Article
ISSN
0021-8979

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The deflection control of a small cantilever is described, which operates using a single active piezoelectric element and optical vibration sensing, so that unwanted vibrations in the cantilever are removed, and yet it remains possible to deflect the cantilever statically or dynamically as required.