Micro/nanomechanical resonators for distributed mass sensing with capacitive detection

✍ Scribed by Julien Arcamone; Gemma Rius; Gabriel Abadal; Jordi Teva; Nuria Barniol; Francesc Pérez-Murano

• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 257 KB
• Volume: 83
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2006.01.177