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Nanoindentation of thin films: Simulations and experiments

✍ Scribed by Nair, Arun K.; Cordill, M.J.; Farkas, Diana; Gerberich, W.W.

Book ID
120312152
Publisher
Cambridge University Press
Year
2009
Tongue
English
Weight
795 KB
Volume
24
Category
Article
ISSN
0884-2914

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Three-dimensional molecular dynamics (MD) simulation is used to investigate the atomistic mechanism of nanoindentation process under different indentation loads, temperatures and loading rates. Diamond and gold were selected as the hard and soft materials. The results showed that when the loads and