Aluminum oxide (Al 2 O 3 ) films were produced on n-type (001) Si, SiO 2 and polyimide (PI) substrates by atomic layer deposition method (ALD). The surface morphologies of the coatings were characterized by XRD and AFM, respectively. The adhesive properties of the deposits were investigated as a fun
✦ LIBER ✦
Nanoindentation of amorphous aluminum oxide films III. The influence of the substrate on the elastic properties
✍ Scribed by N.G. Chechenin; J. Bøttiger; J.P. Krog
- Book ID
- 108389089
- Publisher
- Elsevier Science
- Year
- 1997
- Tongue
- English
- Weight
- 760 KB
- Volume
- 304
- Category
- Article
- ISSN
- 0040-6090
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