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Influence of the substrate hydrophilicity on the grid assisted deposition of tris-(8-hydroxyquinolinato) aluminum(III) thin films

✍ Scribed by Massimiliano Massi; Massimiliano Cavallini; Fabio Biscarini

Book ID
108280732
Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
366 KB
Volume
603
Category
Article
ISSN
0039-6028

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Aluminum oxide (Al 2 O 3 ) films were produced on n-type (001) Si, SiO 2 and polyimide (PI) substrates by atomic layer deposition method (ALD). The surface morphologies of the coatings were characterized by XRD and AFM, respectively. The adhesive properties of the deposits were investigated as a fun