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Nanoindentation hardness measurements using atomic force microscopy

โœ Scribed by Bhushan, Bharat; Koinkar, Vilas N.


Book ID
120079522
Publisher
American Institute of Physics
Year
1994
Tongue
English
Weight
706 KB
Volume
64
Category
Article
ISSN
0003-6951

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## Abstract This article discusses calibration issues for shallow depth nanoindentation experiments with Berkovich tips with respect to the accurate measurement of the diamond area function (DAF). For this purpose, two different calibration procedures are compared: (i) the direct measurement of the