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Nanoindentation and atomic force microscopy measurements on reactively sputtered TiN coatings

✍ Scribed by Harish C. Barshilia; K. S. Rajam

Book ID
110644448
Publisher
Springer-Verlag
Year
2004
Tongue
English
Weight
441 KB
Volume
27
Category
Article
ISSN
0250-4707

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## Abstract This article discusses calibration issues for shallow depth nanoindentation experiments with Berkovich tips with respect to the accurate measurement of the diamond area function (DAF). For this purpose, two different calibration procedures are compared: (i) the direct measurement of the