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Nanoindentation and nanomachining characteristics of gold and platinum thin films

โœ Scribed by Te-Hua Fang; Win-Jin Chang; Cheng-I Weng

Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
891 KB
Volume
430
Category
Article
ISSN
0921-5093

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Understanding the mechanical properties of materials with external dimensions on the nanometer scale is crucial for the design and fabrication of nanoelectronics and nanosystems. Metal thin films exhibit a size-dependent hardening effect that scales inversely with the film thickness down to 200 nm.