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Nanoimprinting using release-agent-coated resins

✍ Scribed by Makoto Okada; Masayuki Iwasa; Ken-ichiro Nakamatsu; Kazuhiro Kanda; Yuichi Haruyama; Shinji Matsui

Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
360 KB
Volume
86
Category
Article
ISSN
0167-9317

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