๐”– Bobbio Scriptorium
โœฆ   LIBER   โœฆ

Nanohenry inductance measurement using a low parasitic-inductance probe

โœ Scribed by Hiroya Shimizu; Tatsuya Nagata; Atsushi Nakamura

Book ID
102819828
Publisher
John Wiley and Sons
Year
1996
Tongue
English
Weight
574 KB
Volume
79
Category
Article
ISSN
8756-663X

No coin nor oath required. For personal study only.

๐Ÿ“œ SIMILAR VOLUMES

Interface structure of microcrystalline
Interface structure of microcrystalline silicon deposited by inductive coupled plasma using internal low inductance antenna
โœ H. Kaki; A. Tomyo; E. Takahashi; T. Hayashi; K. Ogata; A. Ebe; K. Takenaka; Y. S ๐Ÿ“‚ Article ๐Ÿ“… 2008 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 777 KB

Hydrogenated microcrystalline silicon (ยตc-Si:H) films were prepared by inductive coupled plasma chemical vapor deposition (ICP-CVD) system using internal low inductance antenna (LIA) units on various under layer composed of Si, O, and N. The resultant changes in the crystallinity of the ยตc-Si:H film