Nanofabrication: Principles, Capabilities and Limits

✍ Scribed by Zheng Cui (auth.)

• Publisher: Springer International Publishing
• Year: 2017
• Tongue: English
• Leaves: 442
• Edition: 2
• Category: Library

✦ Synopsis

This second edition of Nanofabrication is one of the most comprehensive introductions on nanofabrication technologies and processes. A practical guide and reference, this book introduces readers to all of the developed technologies that are capable of making structures below 100nm. The principle of each technology is introduced and illustrated with minimum mathematics involved. Also analyzed are the capabilities of each technology in making sub-100nm structures, and the limits of preventing a technology from going further down the dimensional scale. This book provides readers with a toolkit that will help with any of their nanofabrication challenges.

✦ Table of Contents

Front Matter....Pages i-xvii
Introduction....Pages 1-7
Nanofabrication by Photons....Pages 9-90
Nanofabrication by Electron Beam....Pages 91-148
Nanofabrication by Ion Beam....Pages 149-175
Nanofabrication by Scanning Probes....Pages 177-207
Nanofabrication by Replication....Pages 209-266
Nanoscale Pattern Transfer by Etching....Pages 267-304
Nanoscale Pattern Transfer by Deposition....Pages 305-333
Indirect Nanofabrication....Pages 335-364
Nanofabrication by Self-Assembly....Pages 365-399
Applications of Nanofabrication Technologies....Pages 401-426
Back Matter....Pages 427-432

✦ Subjects

Nanotechnology and Microengineering;Continuum Mechanics and Mechanics of Materials;Circuits and Systems;Optics and Electrodynamics