Nanofabrication: Principles and Applications

✍ Scribed by Christo Papadopoulos (auth.)

• Publisher: Springer International Publishing
• Year: 2016
• Tongue: English
• Leaves: 84
• Series: SpringerBriefs in Materials
• Edition: 1
• Category: Library

✦ Synopsis

This book provides an overview of the techniques and tools of nanostructure fabrication from state-of-the-art lithography to emerging self-assembly approaches. Top-down and bottom-up methodologies along with hybrid approaches are used to illustrate the fabrication of structures including integrated circuits, semiconductor quantum dots, metallic nanoparticles, carbon nanotubes, molecular structures, nanocomposites, arrays and superstructures. Nanofabrication applications in nanoelectronics, biotechnology, nanomechanical devices and nanophotonics will be examined. This brief will present the core concepts of nanofabrication relevant to researchers and industry in this important and rapidly evolving area.

✦ Table of Contents

Front Matter....Pages i-vi
Introduction....Pages 1-5
Silicon Planar Processing and Photolithography....Pages 7-14
Direct-Write Lithography Approaches....Pages 15-21
Stamping Methods....Pages 23-28
Scanning-Probe Methods....Pages 29-35
Natural Lithography....Pages 37-44
Direct-Growth and Self-assembly....Pages 45-61
Practical Examples and Case Studies of Nanofabrication....Pages 63-81

✦ Subjects

Nanotechnology;Electronics and Microelectronics, Instrumentation;Semiconductors;Nanoscale Science and Technology