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Nanofabrication on a Si surface by slow highly charged ion impact

✍ Scribed by Masahide Tona; Hirofumi Watanabe; Satoshi Takahashi; Nobuyuki Nakamura; Nobuo Yoshiyasu; Makoto Sakurai; Toshifumi Terui; Shinro Mashiko; Chikashi Yamada; Shunsuke Ohtani

Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 431 KB
Volume: 256
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2006.12.057

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