Nanofabrication of arbitrary patterns by nano plastic forming and etching (NPFE)

✍ Scribed by Hassan Rashidi, Masahiko Yoshino

• Book ID: 120742350
• Publisher: Springer
• Year: 2012
• Tongue: English
• Weight: 762 KB
• Volume: 66
• Category: Article
• ISSN: 0268-3768
• DOI: 10.1007/s00170-012-4341-7