Nanocrystalline cubic silicon carbide films prepared by hot-wire chemical vapor deposition using SiH4/CH4/H2 at a low substrate temperature

✍ Scribed by Y. Komura; A. Tabata; T. Narita; A. Kondo; T. Mizutani

• Book ID: 116669046
• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 162 KB
• Volume: 352
• Category: Article
• ISSN: 0022-3093
• DOI: 10.1016/j.jnoncrysol.2005.11.102