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Nano-structuring of silicon and porous silicon by photo-etching using near field optics

✍ Scribed by Diesinger, H. ;Bsiesy, A. ;Hérino, R.

Publisher: John Wiley and Sons
Year: 2003
Tongue: English
Weight: 243 KB
Volume: 197
Category: Article
ISSN: 0031-8965
DOI: 10.1002/pssa.200306563

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