𝔖 Bobbio Scriptorium
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Nano-scanner for scanning probe microscopes

✍ Scribed by Jae Hong Park, Dong-Yeon Lee


Book ID
119937001
Publisher
The Korean Physical Society
Year
2012
Tongue
English
Weight
572 KB
Volume
61
Category
Article
ISSN
0374-4884

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A pattern generator system for lithography based on scanning force microscopes has been developed. Patterns to be miniaturized onto a chip can be scanned or drawn by any common graphical program. The pattern file is used to control a voltage simultaneously with the microscope probe scanning the surf