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Nano-scale effects of swift heavy ion irradiation in SiOx layers and multilayers

✍ Scribed by W.M. Arnoldbik; D. Knoesen; N. Tomozeiu; F.H.P.M. Habraken

Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 699 KB
Volume: 258
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2006.12.103

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