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Nano- and micro-scale patterning of Si (1 0 0) under keV ion irradiation

✍ Scribed by Yashpal S. Katharria; Sandeep Kumar; A. Tarun Sharma; Dinakar Kanjilal

No coin nor oath required. For personal study only.

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Nano- and micro-scale patterning of Si (1&#xa0;0&#xa0;0) under keV ion irradiation