N2 remote plasma cleaning of InP to improve SiNx:H/InP interface performance

✍ Scribed by E Redondo; M.N Blanco; I Mártil; G González-Dı́az

• Book ID: 108362495
• Publisher: Elsevier Science
• Year: 2000
• Tongue: English
• Weight: 109 KB
• Volume: 40
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/s0026-2714(99)00322-4