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N-substituted hexamethyldisilazanes as new substances for the synthesis of functional films in the system Si-Ge-C-N-H

✍ Scribed by S. V. Sysoev; L. D. Nikulina; A. O. Kolontaeva; M. L. Kosinova; A. A. Titov; V. I. Rakhlin; I. P. Tsyrendorzhieva; A. V. Lis; M. G. Voronkov

Book ID: 111461242
Publisher: Springer
Year: 2011
Tongue: English
Weight: 270 KB
Volume: 81
Category: Article
ISSN: 1070-3632
DOI: 10.1134/s1070363211120140

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