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Films based on the phases in the Si-C-N System: Part 1. Synthesis and characterization of bis(trimethylsilyl)ethylamine as a precursor

✍ Scribed by S. V. Sysoev; A. O. Kolontaeva; L. D. Nikulina; M. L. Kosinova; F. A. Kuznetsov; V. I. Rakhlin; A. V. Lis; M. G. Voronkov

Book ID: 114994025
Publisher: SP MAIK Nauka/Interperiodica
Year: 2012
Tongue: English
Weight: 193 KB
Volume: 38
Category: Article
ISSN: 1087-6596
DOI: 10.1134/s1087659612010129

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