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Multivacancies, interstitials, and self-interstitial migration in silicon

✍ Scribed by S.T. Pantelides; I. Ivanov; M. Scheffler; J.P. Vigneron

Publisher: Elsevier Science
Year: 1983
Weight: 695 KB
Volume: 116
Category: Article
ISSN: 0378-4363
DOI: 10.1016/0378-4363(83)90220-6

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