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Multiscale roughness and modeling of MEMS interfaces

✍ Scribed by C.K. Bora; E.E. Flater; M.D. Street; J.M. Redmond; M.J. Starr; R.W. Carpick; M.E. Plesha

Book ID
106550862
Publisher
Springer US
Year
2005
Tongue
English
Weight
633 KB
Volume
19
Category
Article
ISSN
1023-8883

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