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Multiphoton ionization spectroscopy of germanium atoms produced by multiphoton dissociation of Ge(C2H5)4

✍ Scribed by Melissa Antman; Lyndee Hilt; Elizabeth Christophy; Joseph J. BelBruno

Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
652 KB
Volume
221
Category
Article
ISSN
0009-2614

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✦ Synopsis

The first reported multiphoton ionization spectrum (2 + 1) for atomic germanium has been obtained by multiphoton dissociation of a tetraethylgermane (TEG) precursor. The germanium spectrum indicates that the atoms were produced primarily in the ground electronic state. Time-of-flight mass spectrometry was employed to examine the dissociation mechanism of the parent molecule. Tetraethylgermane was observed to dissociate via both a sequential, neutral channel and an ionic pathway. The results indicate that Ge( CZH5),, is a suitable precursor for chemical vapor deposition in that it may result in 'clean' atomic germanium. The ionization scheme may also be of use in the monitoring of processes at germanium surfaces.

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