๐”– Bobbio Scriptorium
โœฆ   LIBER   โœฆ

Multiparametric microsensor chips for screening applications

โœ Scribed by R. Ehret; W. Baumann; M. Brischwein; M. Lehmann; T. Henning; I. Freund; S. Drechsler; U. Friedrich; M.-L. Hubert; E. Motrescu; A. Kob; H. Palzer; H. Grothe; B. Wolf

Publisher
Springer
Year
2001
Tongue
English
Weight
491 KB
Volume
369
Category
Article
ISSN
1618-2650

No coin nor oath required. For personal study only.

๐Ÿ“œ SIMILAR VOLUMES

Polysilicon as a material for microsenso
Polysilicon as a material for microsensor applications
โœ E. Obermeier; P. Kopystynski ๐Ÿ“‚ Article ๐Ÿ“… 1992 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 985 KB

## Important characterutlcs of boron-doped LPCVD polyslhcon layers with regard to sensor apphcatlons are presented Properks such as the reslstlvlty, temperature coefficient of the resistance, gauge factor and long-term stability are described A pressure sensor utlhzmg polyskon piezoreslstors with