Multilayer mirror with enhanced spectral selectivity for the next generation extreme ultraviolet lithography

✍ Scribed by Medvedev, V. V.; van de Kruijs, R. W. E.; Yakshin, A. E.; Novikova, N. N.; Krivtsun, V. M.; Louis, E.; Yakunin, A. M.; Bijkerk, F.

• Book ID: 121650840
• Publisher: American Institute of Physics
• Year: 2013
• Tongue: English
• Weight: 560 KB
• Volume: 103
• Category: Article
• ISSN: 0003-6951
• DOI: 10.1063/1.4837335