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Multilayer Ceramic Capacitors with Thin (Ba,Sr)TiO3Layers by MOCVD

โœ Scribed by Yukio Sakabe; Yutaka Takeshima; Katsuhiko Tanaka


Book ID
110284539
Publisher
Springer US
Year
1999
Tongue
English
Weight
167 KB
Volume
3
Category
Article
ISSN
1385-3449

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Ba, Sr)TiO (BST) thin-film capacitors with Ir bottom electrodes are recognized to have higher polarization 3 and leakage current as compared to those with conventional Pt electrodes. This paper describes a method to improve the leakage current of BST / Ir films by high-density plasma surface treatme