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Multi-level exposures and 3-D X-ray patterning for high-aspect ratio microstructures

✍ Scribed by C. Khan-Malek; R. Wood; Z. Ling; B. Dudley; S. Stadler

Book ID
114155840
Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
340 KB
Volume
41-42
Category
Article
ISSN
0167-9317

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