MOS Integrated circuits fabricated on multilayer heteroepitaxial silicon-insulator structures for applications to 3-D integrated circuits

✍ Scribed by Sugiura, S.; Yoshida, T.; Kaneko, Y.; Shono, K.; Dumin, D.J.

• Book ID: 114595327
• Publisher: IEEE
• Year: 1985
• Tongue: English
• Weight: 631 KB
• Volume: 32
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/t-ed.1985.22275