Cathodoluminescence (CL) imaging and spectroscopy was used to study ZnO hexagonal nanotubes fabricated by metalorganic chemical vapor deposition on sapphire (0 0 0 1) substrate. The CL spectra at room temperature and low temperature showed that the ZnO nanotubes were incorporated with acceptors. Top
✦ LIBER ✦
Morphology of ZnO grown by MOCVD on sapphire substrates
✍ Scribed by C Munuera; J Zúñiga-Pérez; J.F Rommeluere; V Sallet; R Triboulet; F Soria; V Muñoz-Sanjosé; C Ocal
- Book ID
- 108165705
- Publisher
- Elsevier Science
- Year
- 2004
- Tongue
- English
- Weight
- 516 KB
- Volume
- 264
- Category
- Article
- ISSN
- 0022-0248
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## Abstract The crystalline quality of aluminum nitride (AlN) epilayers grown on sapphire substrates by MOCVD was improved by increasing hydrogen flow rate during the high temperature growth process. The AlN epilayer exhibited a root mean square (rms) of roughness was 1.944 nm from the 2×2 µm^2^ si
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