## Abstract Zirconium nitride (ZrN) coatings were prepared on Si (100) by single ion beam sputtering in N~2~ and Ar mixture at different substrate temperatures. Structure and morphology of the ZrN coatings were analyzed using X‐ray diffraction and atomic force microscopy. Rutherford backscattering
Morphology of singular and vicinal metal surfaces sputtered at different temperatures
✍ Scribed by Pavel Šmilauer; Mark R. Wilby; Dimitri D. Vvedensky
- Publisher
- Elsevier Science
- Year
- 1993
- Weight
- 518 KB
- Volume
- 291
- Category
- Article
- ISSN
- 0167-2584
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